TEM-Lamelle und Verfahren zu deren Herstellung

Details

Veröffentlichungs-Nr.

EP2413126

Aktenzeichen

EP11006234

Anmeldetag

28. Juli 2011

Veröffentlichung

16. September 2015

Erteilung

16. September 2015

Rechtsraum

EP

IPC

G01N1/32// H01J37/20

Abstract

A process for manufacturing a TEM-lamella includes mounting (51) a plate shaped substrate having a thickness in a support, manufacturing (53) a first strip-shaped recess on a first side of the substrate under a first angle to the support by means of a particle beam, and manufacturing (55) a second strip-shaped recess on a second side of the substrate under a second angle to the support by means of a particle beam, such that the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region of lesser thickness. The lamella has a thicker rim region and a thinner central region, with a first strip-shaped recess on a first side of the lamella and a second strip-shaped recess on a second side of the lamella, wherein the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region having a thickness of below 100 nm. An apparatus for executing the process or manufacturing the lamella includes a lamella support pivotable about a transverse axis and a longitudinal axis inclined to the vertical direction, a device for rotating about the longitudinal axis, and stop means for limiting a tilt of the lamella support about the transverse axis.

Anmelder

Firmen

Carl Zeiss Microscopy GmbH
Universität Ulm
Carl Zeiss NTS GmbH

Land

🇩🇪 Deutschland

Fachgebiete