Absolute Entfernung messendes Interferometer mit fester Wellenlänge

Details

Veröffentlichungs-Nr.

EP2418456

Aktenzeichen

EP11177104

Anmeldetag

10. August 2011

Veröffentlichung

27. März 2013

Erteilung

27. März 2013

Rechtsraum

EP

IPC

G01B9/02G01B11/02

Abstract

A fixed wavelength absolute distance interferometer including a first interferometer comprising a first light source transmitting a first light beam having a wavelength W toward a measurement target, a wavefront radius detector configured to provide a first measurement responsive to the wavefront radius at the wavefront radius detector, and a first path length calculating portion calculating a coarse resolution absolute path length measurement R; and a second interferometer comprising a beam transmitting device transmitting a second-interferometer light beam having a wavelength A, a beam splitting/combining device separating the second-interferometer light beam into reference and measurement beams and combining the returning reference and measurement beams into a combined beam, a second-interferometer detector configured to receive the combined beam and provide signals of a phase Õ of the combined beam, and a second path length calculating portion configured to determine a medium resolution absolute path length measurement Z M .

Anmelder

Firma

Mitutoyo Corporation

Land

🇯🇵 Japan

Fachgebiete