Maskenhandhabungsmodul

Details

Veröffentlichungs-Nr.

EP2418545

Aktenzeichen

EP10172693

Anmeldetag

12. August 2010

Veröffentlichung

10. Oktober 2018

Erteilung

10. Oktober 2018

Rechtsraum

EP

IPC

G03F7/20C23C14/04H01L21/00C23C14/56C23C16/04C23C16/54H01L51/00// H01L27/32

Abstract

The present invention relates to the field of mask carriers and mask alignment in vacuum deposition processes. In particular, it relates to mask carriers, respective mask handling modules and methods for aligning a mask. A mask handling module (1) may comprise: a substrate carrier (2) for carrying at least one substrate; a mask carrier (3) for carrying at least two masks, wherein the mask carrier (3) comprises at least two mask carrier sections (31,32) each being adapted to carry a mask; a mask carrier positioning device (39) for moving the mask carrier (3) relative to the substrate carrier (2); wherein the mask carrier sections (31,32) are arranged so that the masks carried on the mask carrier sections (31,32) can be positioned on the mask carrier (3) in respective planes forming an angle (α) with respect to each other so that only one of the at least two masks can be aligned to one of the at least one substrate.

Anmelder

Firma

Applied Materials, Inc.

Land

🇺🇸 USA

Fachgebiete