Verfahren und Vorrichtung zur Formmessung mittels Weisslichtinterferometrie

Details

Veröffentlichungs-Nr.

EP2420796

Aktenzeichen

EP11177655

Anmeldetag

16. August 2011

Veröffentlichung

3. Dezember 2014

Erteilung

3. Dezember 2014

Rechtsraum

EP

IPC

G01B9/02G01B11/24

Abstract

A shape measuring method includes guiding light emitted from a broadband light source to an object to be measured and a reference surface, combining light reflected from the object to be measured with light reflected from the reference surface, and taking a distribution image of an interference light intensity corresponding to each measurement position of the object to be measured, while changing an optical path length difference between a first optical path length and a second optical path length over a whole scanning zone, sequentially storing distribution images of the interference light intensity in the whole scanning zone, and obtaining an interference light intensity string at each measurement position based on the stored distribution images of the interference light intensity, and obtaining a position in an optical axis direction at each measurement position of the object to be measured from a peak position of the interference light intensity string.

Anmelder

Firma

Mitutoyo Corporation

Land

🇯🇵 Japan

Fachgebiete