Filmablagerungsvorrichtung

Details

Veröffentlichungs-Nr.

EP2423353

Aktenzeichen

EP11179525

Anmeldetag

31. August 2011

Veröffentlichung

8. Mai 2013

Erteilung

8. Mai 2013

Rechtsraum

EP

IPC

C23C16/509C23C16/54

Abstract

A film deposition device (10) includes a conveyor of a strip (Z) of substrate in a conveying direction, a film deposition electrode (46) disposed so as to face the substrate, a counter electrode (42) disposed at an opposite side of the film deposition electrode, gas supplier of film deposition gases and a grounded shield (48) disposed in a planar direction of the substrate so as to surround the film deposition electrode. An upstream end portion of the film deposition electrode in the conveying direction is closer to the substrate than an upstream end portion of the grounded shield in the conveying direction corresponding to the upstream end portion of the film deposition electrode.

Anmelder

Firma

Fujifilm Corporation

Land

🇯🇵 Japan

Fachgebiete