Abtastsytem für kapazitive Beschleunigungs- und Dehnungssensoren auf MEMS-Basis und Abtastverfahren

Details

Veröffentlichungs-Nr.

EP2428774

Aktenzeichen

EP10176693

Anmeldetag

14. September 2010

Veröffentlichung

29. Mai 2013

Erteilung

29. Mai 2013

Rechtsraum

EP

IPC

G01D5/24// G01L9/12G01P15/125

Abstract

The invention relates to a method and an electronic readout circuit (50) for measuring a capacitance of a MEMs sensor (90), the readout circuit comprising: an input stage (10) for receiving a first signal (14) from the sensor and for presenting a second signal (17); a charge amplifier stage (20) for amplifying and integrating the second signal; control logic (70) for controlling the readout circuit according to a predefined timing relation synchronized to actuation voltages (51, 52) applied to the sensor for generating the first signal; the readout circuit further comprising: a first switching means (12) for applying a first reference voltage to the sensor; a second switching means (16) for applying the second signal to the charge amplifier stage; the first and the second switching means (12, 16) being controlled according to the predefined timing relation such that a plurality of the second signals are accumulated.

Anmelder

Firma

Stichting IMEC Nederland

Land

🇳🇱 Niederlande

Fachgebiete