Optischer Kodierer mit Fehlausrichtungserkennung und damit assoziiertes Anpassverfahren

Details

Veröffentlichungs-Nr.

EP2482040

Aktenzeichen

EP12152700

Anmeldetag

26. Januar 2012

Veröffentlichung

5. Juni 2019

Erteilung

5. Juni 2019

Rechtsraum

EP

IPC

G01D5/38G01D5/244

Abstract

An optical encoder includes a scale (1) having diffraction gratings formed at predetermined pitches in a measurement axis direction, a detection head (2) relatively movable with respect to the scale, the detection head including a light source portion (211) configured to irradiate the scale with light, and a plurality of receiver portions (221) configured to receive light reflected by or transmitted through the diffraction gratings of the scale, at different phases, and a signal processing device (4) configured to perform signal processing to light reception signals output from the receiver portions of the detection head, to produce quadrature differential signals. The signal processing device (4) is configured to calculate alignment adjustment monitor signals corresponding to a Lissajous radius of the quadrature differential signals in order to detect misalignment of the detection head with respect to the scale.

Anmelder

Firma

Mitutoyo Corporation

Land

🇯🇵 Japan

Fachgebiete