Winkelgeschwindigkeitssensor und elektronische Vorrichtung

Details

Veröffentlichungs-Nr.

EP2489981

Aktenzeichen

EP12155738

Anmeldetag

16. Februar 2012

Veröffentlichung

2. Juli 2014

Rechtsraum

EP

IPC

G01C19/56G01C19/5733G01C19/5747

Abstract

A physical quantity sensor includes: a substrate; a first displacement member and a second displacement member disposed in a spatial plane on the substrate and having rotation shafts, respectively; fixed electrodes disposed on the substrate at positions opposed to the first displacement member and the second displacement member; a support member which supports the respective rotation shafts of the first displacement member and the second displacement member; fixing members which support the support member via a spring unit; and a driving unit which oscillates the support member in an oscillation direction. Each of the first displacement member and the second displacement member shifts in a direction perpendicular to the spatial plane around an axis of the corresponding rotation shaft. Each of the rotation shafts of the first displacement member and the second displacement member is disposed at a position shifted from the center of gravity of the corresponding displacement member. The shift direction of the rotation shaft of the first displacement member from the center of gravity of the displacement member is opposite to the shift direction of the rotation shaft of the second displacement member from the center of gravity of the second displacement member.

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan

Fachgebiete