Kalibrierungswerkzeug für eine Inline-Beschichtungsmaschine, Betriebsverfahren dafür und Verfahren zum Beschichten eines Substrats

Details

Veröffentlichungs-Nr.

EP2518178

Aktenzeichen

EP11164348

Anmeldetag

29. April 2011

Veröffentlichung

1. Januar 2014

Erteilung

1. Januar 2014

Rechtsraum

EP

IPC

C23C14/12C23C14/54

Abstract

A process of coating at least one substrate with a plurality of deposition sources, a method of tooling, a carrier unit and a deposition system are described. The systems and methods provide for or allow for exposing a first substrate portion 112a of said at least one substrate 112 to a first deposition source 118a through an aperture 122 of a carrier unit 110, 510, depositing a first layer 126a over the first substrate portion, said first layer including material from said first deposition source, varying a relative position between said at least one substrate and said aperture for exposing a second substrate portion of said at least one substrate, or another substrate, to a second deposition source, and depositing a second layer 126b over the second substrate portion 112b, said second layer including material from said second deposition source.

Anmelder

Firma

Applied Materials, Inc.

Land

🇺🇸 USA

Fachgebiete