Substratverarbeitungssystem und Substratverarbeitungsprogramm

Details

Veröffentlichungs-Nr.

EP2518437

Aktenzeichen

EP12165664

Anmeldetag

26. April 2012

Veröffentlichung

16. August 2017

Erteilung

16. August 2017

Rechtsraum

EP

IPC

G01B11/06H01L33/00G01N21/00G01N21/64G01N21/66

Abstract

According to one embodiment, a substrate processing system(100) includes a measuring unit(102c), a data processing unit(104), and a processing unit(103). The measuring unit(102c) is configured to measure information relating to a thickness dimension of a substrate(10). The substrate(10) includes a light emitting unit(2) and a wavelength conversion unit(8). The wavelength conversion unit(8) includes a phosphor. The data processing unit(104) is configured to determine processing information relating to a thickness direction of the wavelength conversion unit(8) based on the measured information relating to the thickness dimension of the substrate(10) and based on information relating to a characteristic of light emitted from the light emitting unit(2). The processing unit(103) is configured to perform processing of the wavelength conversion unit(8) based on the determined processing information.

Anmelder

Firma

Kabushiki Kaisha Toshiba

Land

🇯🇵 Japan

Fachgebiete