Verfahren und Vorrichtung für die flüssigkeitsgesteuerte Selbstanordnung von Mikrokomponenten

Details

Veröffentlichungs-Nr.

EP2523214

Aktenzeichen

EP12167520

Anmeldetag

10. Mai 2012

Veröffentlichung

9. September 2020

Erteilung

9. September 2020

Rechtsraum

EP

IPC

H01L21/98H01L21/683

Abstract

The present invention is related to a method and apparatus for self-assembly of micro-components (15) such as microchips onto a carrier substrate (10), provided with assembly locations (11) for said components. In the method of the invention, the components are supplied to the carrier by a liquid flow, while a template substrate (13) is arranged facing the carrier (10). The template is a substrate provided with openings (14) aligned to the assembly locations (11). The carrier and template are submerged into a tank (16) filled with the liquid (2), while the liquid flow is supplied to the template side together with the components, so that the components are guided towards said openings by the flow of liquid. Once a component is trapped into an opening (14) of the template, substantially no further liquid flow through said opening is possible, so that following components are guided towards the remaining openings, thereby establishing a fast and reliable self-assembly process.

Anmelder

Firmen

IMEC
Imec VZW

Land

🇧🇪 Belgien

Fachgebiete