Bedampfungsvorrichtung mit separatem Ziel und Bedampfungsverfahren damit

Details

Veröffentlichungs-Nr.

EP2527488

Aktenzeichen

EP12168957

Anmeldetag

22. Mai 2012

Veröffentlichung

21. August 2013

Erteilung

21. August 2013

Rechtsraum

EP

IPC

C23C14/35

Abstract

A separated target apparatus includes a base plate; and a plurality of source units including a plurality of separated targets that are adhered on one surface of the base plate and that form a regular array, and a plurality of magnets that are adhered on the other surface of the base plate and that make a pair with the plurality of separated targets. The plurality of source units are arrayed in parallel at an angle between a first direction that is a direction of the regular array and a second direction that is perpendicular to the first direction. Sputtering is performed by using the separated target apparatus having the aforementioned structure.

Anmelder

Firma

Samsung Display Co., Ltd.

Land

🇰🇷 Südkorea

Fachgebiete