Elektrisches Bauteil umfassend ein Material mit einer Perowskitstruktur und optimierte Elektroden sowie entsprechendes Herstellungverfahren

Details

Veröffentlichungs-Nr.

EP2530755

Aktenzeichen

EP12168677

Anmeldetag

21. Mai 2012

Veröffentlichung

26. März 2014

Erteilung

26. März 2014

Rechtsraum

EP

IPC

H01L41/047H01L41/29H01L41/08

Abstract

Electrical component comprises a lead-based perovskite crystal material layer between a lower electrode on the surface of a substrate and an upper electrode, where the lower electrode comprises a stabilizing first layer made of a first material and a seeding second layer made of a second material, and the first and second materials have the same chemical composition but different structural parameters and/or densities. Independent claims are also included for: (1) an actuator comprising the electrical component, where the substrate comprises at least one apertured part in order to define a released zone that can deform comprising the layer of perovskite material; and (2) fabricating the component, comprising producing, at a given crystallization temperature, a layer of perovskite material between a lower electrode and an upper electrode, by (a) producing a stabilizing first layer by depositing platinum at a first maximum temperature and (b) producing a seeding second layer by depositing platinum at a second maximum temperature that is below the first temperature and the crystallization temperature of the perovskite material.

Anmelder

Firmen

COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Land

🇫🇷 Frankreich

Fachgebiete