Verfahren und Vorrichtung zur Konditionierung eines Polierkissens

Details

Veröffentlichungs-Nr.

EP2532478

Aktenzeichen

EP12004310

Anmeldetag

6. Juni 2012

Veröffentlichung

10. August 2016

Erteilung

10. August 2016

Rechtsraum

EP

IPC

B24B49/18B24B53/02B24B49/00B24B53/017

Abstract

A method of and an apparatus for conditioning a surface of a polishing pad 2 is used for conditioning a polishing pad on a polishing table 1 for polishing a thin film formed on a surface of a substrate W . The conditioning method includes bringing a dresser 22 into contact with the polishing pad, and conditioning the polishing pad by moving the dresser between a central part of the polishing pad and an outer circumferential part of the polishing pad. A moving speed of the dresser at a predetermined area of the polishing pad is controlled by a controller 40 to be higher than a standard moving speed of the dresser at the predetermined area of the polishing pad.

Anmelder

Firma

EBARA CORPORATION

Land

🇯🇵 Japan

Fachgebiete