Hochspannungsversorgungseinheit für ein Teilchenstrahlgerät

Details

Veröffentlichungs-Nr.

EP2535920

Aktenzeichen

EP12172133

Anmeldetag

15. Juni 2012

Veröffentlichung

4. März 2015

Rechtsraum

EP

IPC

H01J37/248G01R15/16

Abstract

The invention relates to a high-voltage supply unit (100) for a particle beam device (11, 12) and to a particle beam device (11, 12) comprising a high-voltage supply unit (100) of this type. The high-voltage supply unit (100) has at least one high-voltage cable (101) for feeding a high voltage, and comprising at least one measuring device (105) for measuring the high voltage, wherein the measuring device (105) has at least one first capacitor (108), and wherein the first capacitor is formed by at least one first section (108) of the high-voltage cable (101).

Anmelder

Firma

Carl Zeiss Microscopy GmbH

Land

🇩🇪 Deutschland

Fachgebiete