Vakuumabscheidungsvorrichtung

Details

Veröffentlichungs-Nr.

EP2548992

Aktenzeichen

EP12004988

Anmeldetag

5. Juli 2012

Veröffentlichung

22. März 2017

Erteilung

22. März 2017

Rechtsraum

EP

IPC

C23C14/32C23C14/34C23C14/35C23C14/50H01J37/32H01J37/34

Abstract

Disclosed is a vacuum deposition apparatus which suppresses mutual interference of magnetic fields generated by multiple magnetic-field applying mechanisms for evaporation sources. The vacuum deposition apparatus includes a deposition chamber; a magnetic-field applying mechanism of sputtering evaporation source disposed in the deposition chamber, a magnetic-field applying mechanism of arc evaporation source disposed in the same deposition chamber; and magnetic-field shielding units arranged so as to cover partially or entirely at least one of these magnetic-field applying mechanisms for evaporation sources (preferably the magnetic-field applying mechanism of sputtering evaporation source). Portions (portions to face a target material upon closing) of openable units of magnetic-field shielding units are preferably made from a non-magnetic material.

Anmelder

Firma

Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)

Land

🇯🇵 Japan

Fachgebiete