Optische Vorrichtung und Registrierungsverfahren

Details

Veröffentlichungs-Nr.

EP2579026

Aktenzeichen

EP12006914

Anmeldetag

5. Oktober 2012

Veröffentlichung

27. November 2019

Erteilung

27. November 2019

Rechtsraum

EP

IPC

G01N21/64G01N21/88G01N15/14G02B21/00G02B21/36G01N15/10G01N35/00

Abstract

An optical equipment (1) for inspecting and addressing a specimen (12) is disclosed. The optical equipment (1) comprises an optical device (10) and a processing module (180). The optical device (10) comprises a light source (102), a sample inspecting device and an address detecting device. The sample inspecting device comprises a first objective lens (110) and a first detector (104). A beam (L1) is focused on a sample (S) placed in an inspected site (12A) of a specimen (12) by the first objective lens (110). The address detecting device comprises a second objective lens (140) and a second detector (144). A beam (L2) is focused on the address coding site (12B) by the second objective lens (140). The processing module (180) controls the beam (L1) to be focused on the sampling points of the inspected site (12A) to generate first optical signals (S1), and simultaneously controls the beam (L2) of the light source (142) to be focused on the corresponding address codes of the address coding site (12B) to generate second optical signals (S2).

Anmelder

Firma

Industrial Technology Research Institute

Land

🇹🇼 Taiwan

Fachgebiete