Piezoelektrische Vorrichtung und Verfahren zur Herstellung einer piezoelektrischen Vorrichtung

Details

Veröffentlichungs-Nr.

EP2579347

Aktenzeichen

EP12186954

Anmeldetag

2. Oktober 2012

Veröffentlichung

25. Februar 2015

Erteilung

25. Februar 2015

Rechtsraum

EP

IPC

H01L41/047H01L41/09H01L41/316H01L41/297

Abstract

A piezoelectric device (10, 50, 90, 100, 150, 160) includes: a substrate (12, 30, 110, 170); a first electrode (14, 32, 114) which is layered over the substrate (12, 30, 110, 170); a first piezoelectric film (16, 34, 116) which is layered over the first electrode (14, 32, 114); a metal oxide film (18, 36, 62A, 62B, 118) which is layered over the first piezoelectric film (16, 34, 116); a metal film (20, 38, 64A, 64B, 120) which is layered over the metal oxide film (18, 36, 62A, 62B, 118); a second piezoelectric film (22, 44, 74, 122) which is layered over the metal film (20, 38, 64A, 64B, 120); and a second electrode (24, 46, 82, 124) which is layered over the second piezoelectric film (22, 44, 74, 122).

Anmelder

Firma

Fujifilm Corporation

Land

🇯🇵 Japan

Fachgebiete