Filmformungsvorrichtung und Filmformungsverfahren

Details

Veröffentlichungs-Nr.

EP2587519

Aktenzeichen

EP12189677

Anmeldetag

24. Oktober 2012

Veröffentlichung

21. Oktober 2015

Rechtsraum

EP

IPC

H01J37/34

Abstract

A film formation apparatus of the present invention has two sputtering evaporation sources each of which includes an unbalanced magnetic field formation means formed by an inner pole magnet arranged on the inner side and an outer pole magnet arranged on the outer side of this inner pole magnet, the outer pole magnet having larger magnetic line density than the inner pole magnet, and a target arranged on a front surface of the unbalanced magnetic field formation means, and further has an AC power source for applying alternating current whose polarity is switched with a frequency of 10 kHz or more between the targets of the two sputtering evaporation sources so as to generate discharge between both the targets and perform film formation. <img class="EMIRef" id="131196466-iaf01" />

Anmelder

Firma

Kabushiki Kaisha Kobe Seiko Sho

Land

🇯🇵 Japan

Fachgebiete