Verfahren zum Zuführen von mehreren Reaktiven Prozessgasen zu einer Verarbeitungsstelle eines Teilchenstrahlgeräts

Details

Veröffentlichungs-Nr.

EP2618361

Aktenzeichen

EP13000334

Anmeldetag

23. Januar 2013

Veröffentlichung

23. Mai 2018

Erteilung

23. Mai 2018

Rechtsraum

EP

IPC

H01J37/305H01J37/02

Abstract

A system for supplying a process gas to a processing location 7 of a particle beam system 1 comprises a gas reservoir 63; a gas conduit 65; a pipe 69 located close to the processing location; a valve 67 provided between the gas conduit and the pipe; and a controller 71 configured to open and to close the valve to switch the system from a first mode of operation in which process gas is not supplied to the processing location to a second mode of operation in which process gas is supplied to the processing location. The controller can alternately open and close the valve in cycles, wherein each cycle includes a first duration in which the valve is open and a second duration in which the valve is closed, wherein a ratio between the first duration and the second duration can be changed.

Anmelder

Firma

Carl Zeiss Microscopy GmbH

Land

🇩🇪 Deutschland

Fachgebiete