Spektroskopische Vorrichtung

Details

Veröffentlichungs-Nr.

EP2647983

Aktenzeichen

EP13001723

Anmeldetag

4. April 2013

Veröffentlichung

26. Mai 2021

Erteilung

26. Mai 2021

Rechtsraum

EP

IPC

G01N23/20G21K1/06

Abstract

To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings G<1>to G<3>, the corresponding energy ranges for G<1>, G<2>, and G<3>being 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles α<1>to α<3>for G<1>to G<3>measured from the normal line of the diffraction grating are specified to be α<1>< α<2>< α<3>. Presupposing the normal lines of all diffraction gratings are superposed upon a common normal line, in order to meet α<1>< α<2>< α<3>, the center positions Δ<1>to Δ<3>for G<1>to G<3>are set on the normal line (as Δ<1>< Δ<2>< Δ<3>). From G<1>to G<3>, one diffraction grating can be selected.

Anmelder

Firmen

National Institutes for Quantum and Radiological Science and Technology
Jeol Ltd.
Shimadzu Corporation
TOHOKU UNIVERSITY
Japan Atomic Energy Agency

Land

🇯🇵 Japan

Fachgebiete