Elektroneninterferenzmikroskop

Details

Veröffentlichungs-Nr.

EP2667400

Aktenzeichen

EP13169141

Anmeldetag

24. Mai 2013

Veröffentlichung

21. November 2018

Erteilung

21. November 2018

Rechtsraum

EP

IPC

H01J37/295

Abstract

In an interference electron microscope, a first electron biprism (12) is disposed between an acceleration tube (39) and an illumination-lens system, a mask (29) is disposed between the acceleration tube and the first electron biprism, and the first electron biprism is arranged in a shadow that the mask forms. Current densities of first and second electron beams on a parabolic surface of an objective lens system where a sample (6) is positioned are controlled by a control system by an optical action of the illumination-lens system, the mask is imaged on the parabolic surface of the objective lens system, and an electro-optical length between the first electron biprism and the parabolic surface of the objective lens where the sample is positioned is controlled without generating Fresnel fringes on a sample surface from the mask and the first electron biprism.

Anmelder

Firmen

RIKEN
Hitachi, Ltd.
Hitachi Ltd.

Land

🇯🇵 Japan

Fachgebiete