Teilchenstrahlsystem und Verfahren zur Verarbeitung einer TEM-Probe

Details

Veröffentlichungs-Nr.

EP2722661

Aktenzeichen

EP13004994

Anmeldetag

18. Oktober 2013

Veröffentlichung

6. Dezember 2017

Erteilung

6. Dezember 2017

Rechtsraum

EP

IPC

H01J37/26H01J37/305G01N1/32

Abstract

A method of processing a TEM-sample, wherein the method comprises: mounting an object in a particle beam system such that the object is disposed in an object region of the particle beam system; directing of a first particle beam onto the object region from a first direction, wherein the first particle beam is an ion beam; and then rotating the object about an axis by 180°, wherein the following relation is fulfilled: 35 ¢ ° ¤ ± ¤ 55 ¢ ° , wherein ± denotes a first angle between the first direction and the axis; and then directing of the first particle beam onto the object region from the first direction; wherein material is removed from the object during the directing of the first particle beam onto the object region. Furthermore, a second particle beam may be directed onto the object region, and particles emanating from the object region can be detected.

Anmelder

Firma

Carl Zeiss Microscopy GmbH

Land

🇩🇪 Deutschland

Fachgebiete