Verfahren zur Analyse einer Probe und geladene Partikelstrahlvorrichtung zur Analyse einer Probe

Details

Veröffentlichungs-Nr.

EP2755021

Aktenzeichen

EP13151344

Anmeldetag

15. Januar 2013

Veröffentlichung

22. Juni 2016

Erteilung

22. Juni 2016

Rechtsraum

EP

IPC

G01N23/225

Abstract

The invention refers to a method and a charged particle beam device (1) for analyzing an object (24) using a charged particle beam interacting with the object (24). The object (24) comprises a sample (15A) embedded in a resin (15B). Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin (15B) is arranged and in which the sample (15A) is arranged. Interaction particles are detected to identify particles within the resin (15B) and the sample (15A) for further analysis by using EDX analysis.

Anmelder

Firma

Carl Zeiss Microscopy Ltd.

Land

🇬🇧 Großbritannien

Fachgebiete