Optisches Modul und elektronische Vorrichtung

EP2759818 Art A3 10. Januar 2018

Anmelder: Seiko Epson Corporation 🇯🇵

Details

Veröffentlichungs-Nr.
EP2759818
Aktenzeichen
EP14152626
Anmeldetag
27. Januar 2014
Veröffentlichung
10. Januar 2018
Rechtsraum
EP
IPC
G01J3/26G02B26/00G02B5/28
Offizieller Volltext

Abstract

An optical module includes a stationary substrate (51), a movable substrate (52), a stationary reflecting film (54) provided to the stationary substrate, a movable reflecting film (55) provided to the movable substrate and opposed to the stationary reflecting film, a first control electrode (571) disposed outside the stationary reflecting film in a filter plan view, a second control electrode (572) disposed outside the movable reflecting film in the filter plan view, and opposed to the first control electrode, and a tilt control section (152) adapted to make a first control current flow through the first control electrode, and make a second control current, which has an opposite direction to the first control current in the filter plan view, flow through the second control electrode.

Anmelder

Firma
Seiko Epson Corporation
Land
🇯🇵 Japan
🇯🇵 Epson

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