Abscheidungsvorrichtung sowie Verfahren zur Herstellung einer organischen lichtemittierenden Anzeigevorrichtung unter Verwendung davon

Details

Veröffentlichungs-Nr.

EP2799592

Aktenzeichen

EP14156295

Anmeldetag

24. Februar 2014

Veröffentlichung

4. April 2018

Erteilung

4. April 2018

Rechtsraum

EP

IPC

C23C14/56C23C14/24C23C14/50C23C14/54

Abstract

A deposition apparatus is capable of checking, in real time, the thickness or uniformity of a thin layer which is formed. The deposition apparatus includes a moving unit (430) to which a substrate (2, 50) is detachably fixed. A conveyer unit (400) conveys the moving unit (430) in a first direction (A) or in an opposite direction to the first direction (A). A deposition unit (100) includes at least one deposition assembly (100-1, ...,100-11) for depositing a deposition material (115) on the substrate (2, 50). A discharge data acquisition unit (600) acquires data associated with the amount of the deposition material (115) discharged per unit time from the at least one deposition assembly (100-1, ..., 100-11). A transmission unit (610) transmits the data acquired by the discharge data acquisition unit (600).

Anmelder

Firma

Samsung Display Co., Ltd.

Land

🇰🇷 Südkorea

Fachgebiete