Integrierte Bildgebungsvorrichtung für Infrarotstrahlung und Herstellungsverfahren

Details

Veröffentlichungs-Nr.

EP2802009

Aktenzeichen

EP13167095

Anmeldetag

8. Mai 2013

Veröffentlichung

24. März 2021

Erteilung

24. März 2021

Rechtsraum

EP

IPC

H01L27/146G01J5/02G01J5/04G01J5/08H01L31/0232G01J5/00

Abstract

The integrated imaging device comprises a substrate (1) with an integrated circuit (4), a cover (2), a cavity (6) enclosed between the substrate (1) and the cover (2), and a sensor (5) or an array of sensors (5) arranged in the cavity (6). A surface (11, 12) of the substrate (1) or the cover (2) opposite the cavity (6) has a structure (8) directing incident radiation. The surface structure (8) may be a plate zone or a Fresnel lens focusing infrared radiation and is preferably etched into the surface of the substrate or cover, respectively. At least one through-substrate via (9) may be provided to connecting the sensor (5) or array of sensors (5) electrically with a connection pad (10) on the surface (11) of the substrate (1) opposite the cavity (6).

Anmelder

Firmen

ams AG
AMS AG

Land

🇦🇹 Österreich

Fachgebiete