Wellenfrontmessverfahren, Formmessverfahren, Verfahren zur Herstellung eines optischen Elements, Verfahren zur Herstellung der optischen Vorrichtung, Programm und Wellenfrontmessvorrichtung

Details

Veröffentlichungs-Nr.

EP2833107

Aktenzeichen

EP14178996

Anmeldetag

29. Juli 2014

Veröffentlichung

6. Mai 2015

Rechtsraum

EP

IPC

G01J9/00G01M11/02

Abstract

A wavefront measurement method includes the steps of causing object light to be incident on a Shack-Hartmann sensor (101), capturing a first spot image under an image pickup condition (A), calculating data of first spot positions (I) that correspond to the first spot image, calculating second spot positions (I') by simulating a second spot image on the basis of the image pickup condition (A) and information of a travelling direction of diffracted light generated when the object light passes through the microlenses, and reducing detection errors of the spot positions by correcting the data of the first spot positions (I) on the basis of data of the second spot positions (I') including data of a detection error due to the diffracted light.

Anmelder

Firma

Canon Kabushiki Kaisha

Land

🇯🇵 Japan

Fachgebiete