Verfahren zur Halbautomatischen Partikelanalyse mit einem Geladenen Teilchenstrahl

Details

Veröffentlichungs-Nr.

EP2835817

Aktenzeichen

EP13003977

Anmeldetag

9. August 2013

Veröffentlichung

20. Dezember 2017

Erteilung

20. Dezember 2017

Rechtsraum

EP

IPC

H01J37/28G06T7/11G06T7/00// H01J37/22

Abstract

A data analysis system for generating analysis data depending on microscopic data of an object generated by a charged particle microscope. The microscopic data comprises an image showing a structure. The method comprises displaying a graphical representation of the structure on the display by the graphical user interface. The method further comprises generating separation data representing at least one path of a separation cut, which separates pixels of the structure from each other. The method further comprises visually marking the separation cut by the graphical user interface, depending on the separation data, by differently marking different area portions of the representation, which represent different pixels of the structure which are separated from each other by the separation cut. The method further comprises generating separate analysis data for each of at least two portions of the object, depending on the microscopic data and depending on the separation data.

Anmelder

Firma

Carl Zeiss Microscopy Ltd.

Land

🇬🇧 Großbritannien

Fachgebiete