System und Verfahren zur Untersuchung eines Gases

Details

Veröffentlichungs-Nr.

EP2878942

Aktenzeichen

EP14195964

Anmeldetag

2. Dezember 2014

Veröffentlichung

12. Februar 2020

Erteilung

12. Februar 2020

Rechtsraum

EP

IPC

G01N9/00G01N11/00G01N29/02G01N29/032G01N29/036G01N29/22G01N30/64// B82Y15/00

Abstract

The invention relates to a gas analysis system comprising: - a fluidic channel intended for the flow of a gas to be analyzed, - at least one detector laid out in said fluidic channel and adapted for measuring interactions of the gas with said detector, said detector comprising at least one resonator (100) of the electromechanical nanosystem (NEMS) type and a heating system (103) for heating at least a part of the detector, - an actuation device (101) for vibrationally actuating the resonator (100) according to an excitation signal applied to an input of the detector, and - a detection device (102) adapted for providing an output electric signal representative of the vibrations of said resonator, - a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of said at least one detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and - a processing device configured for determining from said changes at least one fluidic characteristic of said gas.

Anmelder

Firmen

CALIFORNIA INSTITUTE OF TECHNOLOGY
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
APIX Analytics
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Land

🇺🇸 USA

Fachgebiete