Ultraschallsensor, Verwendungs-Und Herstellungsverfahren des Ultraschallsensors

Details

Veröffentlichungs-Nr.

EP2886210

Aktenzeichen

EP14198884

Anmeldetag

18. Dezember 2014

Veröffentlichung

16. Januar 2019

Erteilung

16. Januar 2019

Rechtsraum

EP

IPC

B06B1/06G10K11/28A61B8/00

Abstract

To provide an ultrasonic sensor that can improve propagation efficiency of an ultrasonic wave, an ultrasonic sensor 1 comprises a substrate 10 where an opening section W is formed; a vibration plate 50 provided on the substrate 10 so as to close the opening section; a piezoelectric element 300 provided on a surface of the vibration plate 50 on an opposite side to the opening section W and having a first electrode 60, a piezoelectric material layer 70, and a second electrode 80; and a reflection layer 71 provided in a space around the piezoelectric element 300 on the surface of the vibration plate on an opposite side to the opening section, to reflect other ultrasonic waves transmitted in a different direction from a transmitted ultrasonic wave transmitted to a measuring target side on an interface between the piezoelectric element and the reflection layer, and having a thickness so as to superimpose other ultrasonic waves on the transmitted ultrasonic wave.

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan

Fachgebiete