Ausgabevorrichtung, Verfahren zur Herstellung davon und Artikel damit

Details

Veröffentlichungs-Nr.

EP2896719

Aktenzeichen

EP15151100

Anmeldetag

14. Januar 2015

Veröffentlichung

14. September 2016

Erteilung

14. September 2016

Rechtsraum

EP

IPC

C23C16/448B01B1/00B01B1/06B01J4/00

Abstract

Disclosed herein is a delivery device comprising a chamber; a gas inlet; a gas outlet; and a dip tube contained within the chamber and having an upper portion and a lower portion, the upper portion of the dip tube being in fluid communication with the gas inlet and being operative to permit the entry of a carrier gas; the lower portion of the dip tube extending into the chamber, the lower portion of the dip tube terminating in an outlet end; and a sleeve; where the sleeve has a first end and a second end; the first end being in an interference fit with the lower portion of the dip tube; and where the sleeve vibrates upon being subjected to a disturbance.

Anmelder

Firmen

Ceres Technologies, Inc.
Rohm and Haas Electronic Materials LLC

Land

🇺🇸 USA

Fachgebiete