Chip zur Plasmaerzeugung, Plasmagenerator und Plasmaspektrometrieverfahren

Details

Veröffentlichungs-Nr.

EP2913664

Aktenzeichen

EP15157054

Anmeldetag

27. Februar 2015

Veröffentlichung

3. Mai 2017

Erteilung

3. Mai 2017

Rechtsraum

EP

IPC

G01N21/67G01N21/71H05H1/46

Abstract

The present invention provides a chip for plasma generation, a plasma generator, and a plasma spectrometry method, having high reproducibility of plasma light emission without a requirement of a discharge unit for removing air bubbles. The chip for plasma generation of the present invention includes a channel, the channel has a first region, a narrow portion, and a second region, the narrow portion is in communication with the first region and the second region and has a cross-sectional area smaller than the first region and the second region, and the chip satisfies at least one of the following conditions (1) and (2): (1) at least one of the inner walls of the first region and the second region has a groove portion; and (2) the chip includes a cathode fixed on the inner wall of the first region.

Anmelder

Firma

ARKRAY, Inc.

Land

🇯🇵 Japan

Fachgebiete