Pellikelkleber und Pellikel mit diesem Kleber

Details

Veröffentlichungs-Nr.

EP2927745

Aktenzeichen

EP15157728

Anmeldetag

5. März 2015

Veröffentlichung

22. April 2020

Erteilung

22. April 2020

Rechtsraum

EP

IPC

G03F1/00G03F1/64G03F1/62

Abstract

There is provided a pellicle 1 for lithography having a frame 12, a film 11 and an agglutinant layer 13 (an adhesive to bond the pellicle on a photomask), in which the agglutinant layer 13 is doped with a luminescence material so as to facilitate the inspection of the quality of the adhesion between the agglutinant layer 13 and the photomask; preferably the luminescence material is a kind that glows in response to UV irradiation, and a preferable dosage of the luminescence material is no less than 0.01 mass % but less than 1.0 mass %.

Anmelder

Firmen

SHIN-ETSU CHEMICAL CO., LTD
Shin-Etsu Chemical Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete