Lichtbestrahlungsvorrichtung und Zeichenvorrichtung

Details

Veröffentlichungs-Nr.

EP2957942

Aktenzeichen

EP15171300

Anmeldetag

10. Juni 2015

Veröffentlichung

13. November 2024

Erteilung

13. November 2024

Rechtsraum

EP

IPC

G02B19/00G03F7/20G02B27/09

Abstract

Laser light from a light source part (41) is guided to an irradiation plane (320) by an irradiation optical system including an array of fly-eye lenses (62) for dividing and superimposing the light beams and transparent parts (61) for inducing different path lengths on the sub-beams. Light fluxes having passed through the element lenses respectively enter the transparent parts. A light condensing part (63) superimposes irradiation regions of the light fluxes on the irradiation plane. When viewed in the arrangement direction of the element lenses, the light fluxes regarded as parallel light enter the light condensing part which includes a diverging lens (631) for causing the parallel light to diverge in a Y direction perpendicular to the arrangement direction, and a converging lens system (632, 633) for causing the light from the diverging lens to converge on the irradiation plane. This configuration readily achieves a design where the focal length of the light condensing part regarding the Y direction is reduced, and suppresses shifts in light condensing positions of the light fluxes on the irradiation plane.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete