Optische Vorrichtung, Verarbeitungsvorrichtung und Artikelherstellungsverfahren

Details

Veröffentlichungs-Nr.

EP3021153

Aktenzeichen

EP15003083

Anmeldetag

28. Oktober 2015

Veröffentlichung

12. Dezember 2018

Erteilung

12. Dezember 2018

Rechtsraum

EP

IPC

G02B19/00B23K26/06G02B7/182G02B26/10

Abstract

An optical apparatus is provided. The apparatus comprises a rotatable reflecting member including a first reflecting surface and a second reflecting surface, an optical system configured to sequentially reflect, by a plurality of reflecting surfaces included therein, light reflected by the first reflecting surface and cause the light to be incident on the second reflecting surface, and an adjusting device configured to change a rotation angle of the reflecting member to adjust an optical path of light that is reflected by the second reflecting surface and exits the second reflecting surface.

Anmelder

Firma

Canon Kabushiki Kaisha

Land

🇯🇵 Japan

Fachgebiete