Fördervorrichtung

Details

Veröffentlichungs-Nr.

EP3031949

Aktenzeichen

EP15196086

Anmeldetag

24. November 2015

Veröffentlichung

6. März 2024

Erteilung

6. März 2024

Rechtsraum

EP

IPC

C23C14/56C23C16/44

Abstract

A delivery device, manufacturing system, and process of manufacturing are disclosed. The delivery device includes a feed tube and a chemical vapor deposition coating applied over an inner surface of the feed tube, the chemical vapor deposition coating being formed from decomposition of dimethylsilane. The manufacturing system includes the delivery device and a chamber in selective fluid communication with the delivery device. The process of manufacturing uses the manufacturing system to produce an article.

Anmelder

Firmen

Silcotek Corp.
Aixtron SE

Land

🇺🇸 USA

Fachgebiete