Formmessverfahren, Formmessvorrichtung, Programm, Aufzeichnungsmedium und Verfahren zur Herstellung eines Optischen Elements

Details

Veröffentlichungs-Nr.

EP3056855

Aktenzeichen

EP16155434

Anmeldetag

12. Februar 2016

Veröffentlichung

12. Juni 2019

Erteilung

12. Juni 2019

Rechtsraum

EP

IPC

G01B11/24G01M11/02

Abstract

A rotary stage is controlled to two measurement positions along a rotational direction in which an object surface is moved when detecting a wavefront of reflected light from partial regions by a detecting unit, to move the object surface. Respective placement errors in a trajectory of the object surface at the two measurement positions are measured based on wavefronts detected by the detecting unit in states in which the rotary stage is controlled to each of the two measurement positions. For the remaining measurement positions among the measurement positions, respective placement errors with respect to the trajectory of the object surface are estimated based on the placement errors measured. Before measurement of each item of partial shape data, the rotary stage is controlled to a measurement position and stages are controlled to a position that cancels a placement error at the measurement position to align the object surface.

Anmelder

Firma

Canon Kabushiki Kaisha

Land

🇯🇵 Japan

Fachgebiete