Piezoelektrisches Element, Anwendungsvorrichtung für Piezoelektrisches Element und Verfahren zur Herstellung eines Piezoelektrischen Elements

Details

Veröffentlichungs-Nr.

EP3073540

Aktenzeichen

EP16161069

Anmeldetag

18. März 2016

Veröffentlichung

8. Mai 2019

Erteilung

8. Mai 2019

Rechtsraum

EP

IPC

H01L41/08B41J2/14H01L41/187H01L41/318H01L41/319

Abstract

A piezoelectric element (300) includes a first electrode (60) formed on a substrate, a piezoelectric layer (70) which is formed on the first electrode and includes a complex oxide with an ABO 3 -type perovskite structure represented by the following formula (1); and a second electrode (80) formed on the piezoelectric layer, in which a seed layer (65) including a complex oxide with an ABO 3 perovskite structure in which K and Nb are included between the first electrode and the piezoelectric layer, and the piezoelectric layer is formed from a polycrystal that is preferentially orientated on the (110) plane. (K X , Na 1-X )NbO 3 (1)

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan

Fachgebiete