Selektives Entfernen von Titannitridhartmaske und Ätzrestentfernung

Details

Veröffentlichungs-Nr.

EP3076424

Aktenzeichen

EP16162624

Anmeldetag

29. März 2016

Veröffentlichung

15. Februar 2023

Erteilung

15. Februar 2023

Rechtsraum

EP

IPC

H01L21/3213// H01L21/311

Abstract

Formulations for stripping titanium nitride hard mask and removing titanium nitride etch residue comprise an amine salt buffer, a non-ambient oxidizer, and the remaining being liquid carrier includes water and non-water liquid carrier selected from the group consisting of dimethyl sulfone, lactic acid, glycol, and a polar aprotic solvent including but not limited to sulfolanes, sulfoxides, nitriles, formamides and pyrrolidones.. The formulations have a pH <4, preferably < 3, more preferably < 2.5. The aqueous formulations having water as liquid carrier and semi-aqueous formulation having water and non-polar aprotic solvent(s) further contain acidic fluoride. The formulations offer high titanium nitride etch rates while provide excellent compatibility towards W, AIN, AIO, and low k dielectric materials. The formulations may comprise weakly coordinating anions, corrosion inhibitors, and surfactants. Systems and processes use the formulations for stripping titanium nitride hard mask and removing titanium nitride etch residue.

Anmelder

Firmen

Versum Materials US, LLC
AIR PRODUCTS AND CHEMICALS, INC.

Land

🇺🇸 USA

Fachgebiete