Piezoelektrische Vorrichtung, Sonde, Elektronische Vorrichtung und Ultraschallabbildungsvorrichtung

Details

Veröffentlichungs-Nr.

EP3098867

Aktenzeichen

EP16171286

Anmeldetag

25. Mai 2016

Veröffentlichung

21. November 2018

Erteilung

21. November 2018

Rechtsraum

EP

IPC

H01L41/09

Abstract

A piezoelectric device (57) includes: an elastic layer (58) that forms an insulating surface region at least partially and has an amorphous structure or random orientation at least in the surface region; a piezoelectric body (63) that is provided on the elastic layer (58), has a first surface in contact with the elastic layer (58) and a second surface on an opposite side to the first surface, and is (100) preferentially oriented in an orientation region corresponding to the surface region in a plan view; a first electrode (61) provided on the second surface of the piezoelectric body (63); and a second electrode (62) that is provided on the second surface of the piezoelectric body (63) . A gap (64) is formed between the first (61) and second electrodes (62) corresponding to the orientation region in the plan view.

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan

Fachgebiete