Piezoelektrisches Element und Vorrichtung mit Angebrachtem Piezoelektrischem Element

Details

Veröffentlichungs-Nr.

EP3098868

Aktenzeichen

EP16171516

Anmeldetag

26. Mai 2016

Veröffentlichung

22. November 2017

Erteilung

22. November 2017

Rechtsraum

EP

IPC

H01L41/187

Abstract

There is provided a piezoelectric element which includes a first electrode which is formed on a substrate, a piezoelectric layer which is formed on the first electrode, and is formed from a compound oxide having an ABO<3>type perovskite structure in which potassium (K), sodium (Na), niobium (Nb), and manganese (Mn) are provided, and a second electrode which is formed on the piezoelectric layer. The manganese includes bivalent manganese (Mn<2+>), trivalent manganese (Mn<3+>), and tetravalent manganese (Mn<4+>). A molar ratio (Mn<2+>/(Mn<3+>+Mn<4+>)) of the bivalent manganese to a sum of the trivalent manganese and the tetravalent manganese is equal to or greater than 0.31.

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan

Fachgebiete