Infrarotbildgebungssystem mit Automatischer Referenzierung

Details

Veröffentlichungs-Nr.

EP3112844

Aktenzeichen

EP16176083

Anmeldetag

24. Juni 2016

Veröffentlichung

19. September 2018

Erteilung

19. September 2018

Rechtsraum

EP

IPC

G01N21/27G01J3/42G01N21/3563G01N21/55G01J3/02G01J3/10G01J3/28// G01N21/47

Abstract

A method and apparatus for obtaining reference samples, i.e. measuring reference targets (62) on a reference stage (61) during the generation of a mid-infrared (MIR) image without requiring that a sample specimen (16), being placed on a specimen stage (57) and imaged, be removed is disclosed. A tunable MIR laser (11) generates a light beam (18) that is focused onto the sample specimen on the specimen stage that moves the specimen in a first direction (33). An optical assembly includes a scanning assembly (31) having a focusing lens (55) and a mirror (56) that moves in a second direction (32), different from the first direction, relative to the specimen stage. A light detector (13) measures an intensity of light leaving the point on the specimen. A controller (39) forms an image from the measured intensity. The reference stage (61) is positioned such that the scanning assembly moves over the reference stage in response to a command so that the controller can also make a reference measurement.

Anmelder

Firma

Agilent Technologies, Inc.

Land

🇺🇸 USA

Fachgebiete