Verfahren zur Bestimmung von Kristallografischen Eigenschaften einer Probe und Elektronenstrahlmikroskop zur Durchführung des Verfahrens

Details

Veröffentlichungs-Nr.

EP3121593

Aktenzeichen

EP15002188

Anmeldetag

23. Juli 2015

Veröffentlichung

8. November 2023

Erteilung

8. November 2023

Rechtsraum

EP

IPC

G01N23/2251

Abstract

Method of determining crystallographic properties of a sample comprises: generating first and second electron beams of electrons having first and second mean kinetic energies, respectively; detecting, for each of first locations of a region of the sample, a two-dimensional spatial distribution of electrons incident onto a detection area while directing the first electron beam onto the first locations; generating, for each of the first locations, first data representing the two-dimensional spatial distribution; detecting, for each of second locations of the region of the sample, a two-dimensional spatial distribution of electrons incident onto the detection area while directing the second electron beam onto the second locations; generating, for each of the second locations, second data representing the two-dimensional spatial distribution; and determining the crystallographic properties for target locations of the region based on the first data of the first locations and the second data of the second locations.

Anmelder

Firma

Carl Zeiss Microscopy GmbH

Land

🇩🇪 Deutschland

Fachgebiete