Gassensor, Array und ein Verfahren zur Herstellung Desselben

Details

Veröffentlichungs-Nr.

EP3124962

Aktenzeichen

EP15178758

Anmeldetag

29. Juli 2015

Veröffentlichung

28. September 2022

Erteilung

28. September 2022

Rechtsraum

EP

IPC

G01N27/12G01N33/00B81B7/02H01L23/31B81C1/00H01L23/00

Abstract

A method for manufacturing a gas sensor, comprising the steps of integrating a processing circuit (36) to a gas sensor chip (3), integrating a heater (34) to the gas sensor chip (3), and applying a sensitive material to the gas sensor chip (3), for building a layer (31) sensitive to a gas. Multiple gas sensor chips (3) are mounted onto a carrier (2), wherein the common carrier (2) comprises sets of contact pads (200). Each set of contact pads (200) electrically contacts one of the multiple gas sensor chips (3), wherein one of the contact pads (22-27) out of each set (200) is a supply contact pad (25), for supplying electrical current to the processing circuit (36) of the corresponding gas sensor chip (3). A set of supply contact pads (250) is electrically interconnected by electrical interconnectors (251).

Anmelder

Firma

Sensirion AG

Land

🇨🇭 Schweiz

Fachgebiete