Belichtungsvorrichtung und Belichtungsverfahren

Details

Veröffentlichungs-Nr.

EP3147930

Aktenzeichen

EP16181810

Anmeldetag

28. Juli 2016

Veröffentlichung

20. März 2019

Erteilung

20. März 2019

Rechtsraum

EP

IPC

H01J37/317H01J37/04

Abstract

Provided is an exposure apparatus that exposes a pattern on a sample, the exposure apparatus including a plurality of blanking electrodes that are provided corresponding to a plurality of charged particle beams and each switch whether the corresponding particle beam irradiates the sample according to an input voltage; an irradiation control section that outputs switching signals for switching blanking voltages supplied respectively to the blanking electrodes; and a measuring section that, for each blanking electrode, measures a delay amount that is from when the switching signal changes to when the blanking voltage changes.

Anmelder

Firma

ADVANTEST CORPORATION

Land

🇯🇵 Japan

Fachgebiete