Drucksensor mit Offenem Membran für Raue Umgebungen

Details

Veröffentlichungs-Nr.

EP3205998

Aktenzeichen

EP17155350

Anmeldetag

9. Februar 2017

Veröffentlichung

26. Oktober 2022

Erteilung

26. Oktober 2022

Rechtsraum

EP

IPC

G01L19/14G01L19/06

Abstract

A pressure sensor comprising a housing (62, 64), a diaphragm wafer (68), and an isolator (66) configured to absorb lateral stress. The diaphragm wafer (68) includes a fully exposed diaphragm (69), a fluid contact surface, a sensing element (74), and a support portion, where the support portion and the contact surface define a cavity. The isolator (66) extends laterally from the support portion to the housing (62, 64). The pressure sensor is easily drainable, eliminating the buildup of particulates, and the diaphragm (69) can be directly wire-bonded to printed circuit boards, eliminating the need for extensive electrical feedthrough.

Anmelder

Firma

Rosemount Aerospace Inc.

Land

🇺🇸 USA

Fachgebiete