Feststoffelektrolyt für Reram
Anmelder: Heraeus Deutschland GmbH & Co. KG 🇩🇪
Details
- Veröffentlichungs-Nr.
- EP3208856
- Aktenzeichen
- EP16156125
- Anmeldetag
- 17. Februar 2016
- Veröffentlichung
- 10. Juli 2019
- Erteilung
- 10. Juli 2019
- Rechtsraum
- EP
- IPC
- H01L45/00C03C3/083C23C14/34
Abstract
The disclosed composition, particularly suitable for resistance switching memories based on metal ion transport, comprises a matrix material of a metal oxide/sulphide/selenide of at least two metals M1 and M2, and a metal M3 which is mobile in the matrix, wherein - the atomic ratio of M1 to M2 is within the range of 75:25 to 99.99:0.01; - the valence states of M1, M2 and M3 are all positive; - the valence state of M1 is larger than the valence state of M2; and - the valence state of M2 is equal to or larger than the valence state of M3. Most preferred is amorphous silicon dioxide with M2=Al partially replacing M1=Si atoms, containing M3=Cu. Fabrication and use of said composition, e.g. as sputtering target for physical vapour deposition, are also disclosed.
Anmelder
- Firma
- Heraeus Deutschland GmbH & Co. KG
- Land
- 🇩🇪 Deutschland
Deutsches Technologieunternehmen mit Sitz in Hanau. Heraeus entwickelt Materialien und Lösungen in den Bereichen Edelmetalle, Sensorik, Medizintechnik und Werkstofftechnik.
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