Dielektrische Dünnschicht und Elektronische Komponente

Details

Veröffentlichungs-Nr.

EP3223287

Aktenzeichen

EP17161390

Anmeldetag

16. März 2017

Veröffentlichung

22. April 2020

Erteilung

22. April 2020

Rechtsraum

EP

IPC

H01G4/10H01G4/12H01G4/33C04B35/053// H01B3/12

Abstract

A dielectric thin film containing MgO as a main component, wherein the dielectric thin film is composed of a columnar structure group containing at least one columnar structure A constructed by single crystal and at least one columnar structure B constructed by polycrystal, respectively, and in the cross section of the direction perpendicular to the dielectric thin film, when the area occupied by the columnar structure A is set as C<A>and the area occupied by the columnar structure B is set as C<B>, the relationship between C<A>and C<B>satisfies 0.4≤C<B>/C<A≤>1.1.

Anmelder

Firma

TDK Corporation

Land

🇯🇵 Japan

Fachgebiete