Homogenisierungsverfahren der Höhe einer Vielzahl von Fäden

Details

Veröffentlichungs-Nr.

EP3263519

Aktenzeichen

EP17178042

Anmeldetag

27. Juni 2017

Veröffentlichung

10. November 2021

Erteilung

10. November 2021

Rechtsraum

EP

IPC

B82Y10/00B82Y40/00C01B32/16H01L29/06

Abstract

One aspect of the invention relates to a method for homogenizing the height of a plurality of wires (2) from said plurality of wires (2) erected on a face of a substrate (1), the method comprising a first step of depositing a first film (3) on the face of the substrate (1) comprising the plurality of wires (2), said first film (3) embedding the plurality of wires (2) over a first height (h1); a second step of depositing a second film (4) on the first film (3), said second film (4) embedding at least a portion of the plurality of wires (2) over a second height (h2); a step of removing the second film (4), the portion of the wires of the plurality of wires (2) embedded in the second film (4) being removed at the same time as said second film (5), a mechanical stress between the first film (3) and the second film (4) being exerted during the removal step. A second aspect of the invention relates to a device comprising a plurality of wires (2) obtained using a method according to a first aspect of the invention.

Anmelder

Firma

Commissariat à l'Energie Atomique et aux Energies Alternatives

Land

🇫🇷 Frankreich

Fachgebiete